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Lecturer(s)
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Course content
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Metrology, standardization, uncertainty, metrological traceability Length nanometrology - problems connected with tiny sizes, metrological AFM, standards, evaluation, surface description Nanometrology of other quantities and nanoetalons
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Learning activities and teaching methods
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Lecture
- Preparation for the Exam
- 50 hours per semester
- Homework for Teaching
- 15 hours per semester
- Attendace
- 25 hours per semester
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Learning outcomes
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Students obtain basic information about general metrology and standardization and deeper insight into metrology of nanostructures, especially in the field of length nanometrology.
Describe usage of metrological principles in nanotechnology
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Prerequisites
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unspecified
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Assessment methods and criteria
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Mark
Knowledge in extent of course
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Recommended literature
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Leach R. (2010). Fundamental Principles of Engineering Nanometrology.. Elsevier.
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Mlčoch J., Rössler T. (2005). Teorie měření a experimentu. Vydavatelství UP, Olomouc.
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Whitehouse D. J. (2003). Handbook of Surface and Nanometrology.. IOP.
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