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Lecturer(s)
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Mašláň Miroslav, prof. RNDr. CSc.
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Vůjtek Milan, Mgr. Ph.D.
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Course content
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1. Microscopic methods for nanoscale o Atomic force microscopy (AM-AFM, FM-AFM, sample preparation), TERS o Electron microscopy (SEM, TEM), sample preparation o Electron tomography 2. Nanofabrication methods o Fundamentals of nanofabrication o Lithography (principles, resists, subtractive and aditive techniques) o Layer preparation (evaporation, sputtering, CVD, MBE) o Electron beam and ion beam lithography o Softlithography (nanoimprint, microcontact print) o Self-assembly and self-assembled monolayers, molecular film deposition o Scanning probe nanolithography (atomic, electric, force and other methods) o DNA nanoconstruction 3. Nanoparticles o Definition and their basic properties o Preparation of nanoparticles (shape, physical and chemical methods), stabilization o Application of nanoparticles (catalysis, optical and magnetic properties, bioapplications) o Fullerens (preparation and properties), fullerites, fullerides o Nanofluids, ferrofluids and colloidal crystals 4. Nanowires - definition, preparation and applications 5. Nanotubes o Graphene, structure of carbon nanotubes and their synthesis o Applications of CNT 6. Other nanosystems o Dendrimers, supramolecules, block polymers o Miceles, nanofibers 7. Manipulation with nanoobjects o Manipulation by SPM and FIB o Optical and magnetic tweezers o Nanomanipulators o Microtools 8. Biomimetics 9. Nanoelectronic systems o Basis and limitations of present integrated electronics o Microvacuum electronics o Computer systems adaptation for nanotechnology (reconfiguration, special gates) o Softcomputing o Bioinspiration (neurons, DNA computers) 10. Nanoelectronic technologies o General requirements o Molecular cascades o Molecular electronics (principles, elements and gates) o Resonant tunneling diodes and transistors o Lasers with quantum well and cascade o One-photon light detectors and sources o Quantum cellular automata o Single-electron devices o Supraconductive electronics 11. Microsystem technologies o definitions, technologies and materials o MST sensors (pressure, accelerometers, gyroscopes, chemical) o Optical systems (micromirrors, MST switching) o RF-MEMS (capacitors, inductors, switches, resonators) 12. Microcantilever o Derivation of parameters, dissipation o Measurement of cantilever deflection 13. Microactuators o Cantilever as an actuator o Step motors o Rotary motors 14. Microfluidic devices 15. Nanoelectromechanical systems o Definitions and comparison with MEMS o Nanotube NEMS o Selected NEMS devices 16. Molecular devices o Fundamentals of molecular devices o Spontaneous movement and molecular tools o Natural motors 17. Measurement in nanoworld o Cantilever as a measurement system o Selected measurement techniques based on nanosystems 18. Nanometrology o Optical and X-ray interferometry COXI o Metrological AFM o Nanostandards
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Learning activities and teaching methods
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Monologic Lecture(Interpretation, Training), Work with Text (with Book, Textbook)
- Homework for Teaching
- 200 hours per semester
- Preparation for the Exam
- 200 hours per semester
- Attendace
- 10 hours per semester
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Learning outcomes
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The aim is to introduce students with applications of nanotechnology: methods of nanofabrication, application of basic nanostructures and nanodevices and characterization methods.
Evaluation Evaluate the particular methods and principles, explain the aspects and results concerning the given issue, integrate the knowledge, predict the solutions, evaluate the results and outcomes.
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Prerequisites
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unspecified
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Assessment methods and criteria
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Mark
Knowledge within the scope of the course topics (examination)
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Recommended literature
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Bhushan, B., Fuchs, H., Hosaka, S. (2003). Applied Scanning Probe Methods. Springer.
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Bhushan, B. (2006). Springer Handbook of Nanotechnology. Springer.
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Cao, G. (2004). Nanostructures & Nanomaterials. Synthesis, Properties & Appliactions. Imperial College Press.
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Dupas, C; Houdy, P.; Lahmani, M. (2007). Nanoscience. Nanotechnologies and Nanophysics. Springer.
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Goser, K.; Glösekötter, P.; Dienstuhl, J. (2004). Nanoelectronics and Nanosystems. Springer.
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HUSÁK, M.:. Mikrosenzory a mikroaktuatory. Academia, 2008.
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KÖHLER, M.; FRITZSCHE, W. Nanotechnology. An Introduction to Nanostructuring Techniques, Wiley 2007.
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Kumar, C. (2006). Nanosystem Characterization Tools in the Life Sciences. Wiley.
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Lyshevski, S. E. (2002). MEMS and NEMS. Systems, Devices, and Structures. CRC Press.
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Madou, M. J. (2001). Fundamentals of Microfabrication. The Science of Miniaturization. CRC Press.
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Poole Ch. P, Owens F. J. (2003). Introduction to Nanotechnology. Wiley-VCh, New Jersey.
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Samori, P. (2006). Scanning Probe Microscopies Beyond Imaging: Manipulation of Molecules and Nanostructures. Wiley.
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Torres, C. M. S. (2003). Alternative Lithography. Unleashing the Potentials of Nanotechnology. Kluwer Academic/Plenum Publishers.
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Wilkening, G.; Koenders, L. (2005). Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range. Wiley.
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Yao, N., Wang, Z. L. (2005). Handbook of Microscopy for Nanotechnology. Kluwer Academic Publishers.
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