Lecturer(s)
|
|
Course content
|
Metrology, standardization, uncertainty, metrological traceability Length nanometrology - problems connected with tiny sizes, metrological AFM, standards, evaluation, surface description Nanometrology of other quantities and nanoetalons
|
Learning activities and teaching methods
|
Lecture
- Preparation for the Exam
- 50 hours per semester
- Homework for Teaching
- 15 hours per semester
- Attendace
- 25 hours per semester
|
Learning outcomes
|
Students obtain basic information about general metrology and standardization and deeper insight into metrology of nanostructures, especially in the field of length nanometrology.
Describe usage of metrological principles in nanotechnology
|
Prerequisites
|
unspecified
|
Assessment methods and criteria
|
Mark
Knowledge in extent of course
|
Recommended literature
|
-
Leach R. (2010). Fundamental Principles of Engineering Nanometrology.. Elsevier.
-
Mlčoch J., Rössler T. (2005). Teorie měření a experimentu. Vydavatelství UP, Olomouc.
-
Whitehouse D. J. (2003). Handbook of Surface and Nanometrology.. IOP.
|